Energy transfer processes in glow discharges

  1. Abril, I.
  2. Gras-Marti, A.
  3. Valles-Abarca, J.A.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 1520-8559 0734-2101

Year of publication: 1986

Volume: 4

Issue: 3

Pages: 1773-1778

Type: Article

DOI: 10.1116/1.573936 GOOGLE SCHOLAR

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