Sputter depth profile analysis of marker layers

  1. Peinador, J.A.
  2. Abril, I.
  3. Jiménez‐Rodríguez, J.J.
  4. Gras‐Marti, A.
Journal:
Surface and Interface Analysis

ISSN: 1096-9918,  0142-2421

Year of publication: 1990

Volume: 15

Issue: 8

Pages: 463-465

Type: Article

DOI: 10.1002/SIA.740150804 GOOGLE SCHOLAR
Data source: Scopus