The effects of model parameter variations on high-fluence ion implantation
- Carter, G.
- Nobes, M.
- Katardjiev, I.
- Abril, I.
- Gras-Marti, A.
- Jimenez-Rodriguez, J.
- Peinador, J.
ISSN: 0042-207X
Year of publication: 1993
Volume: 44
Issue: 8
Pages: 783-789
Type: Article