Multiscale simulation of the focused electron beam induced deposition process

  1. de Vera, P.
  2. Azzolini, M.
  3. Sushko, G.
  4. Abril, I.
  5. Garcia-Molina, R.
  6. Dapor, M.
  7. Solov’yov, I.A.
  8. Solov’yov, A.V.
Journal:
Scientific Reports

ISSN: 2045-2322

Year of publication: 2020

Volume: 10

Issue: 1

Type: Article

DOI: 10.1038/S41598-020-77120-Z GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus