Ion-beam processing of silicon at keV energies: A molecular-dynamics study

  1. Caturla, M.
  2. Díaz de la Rubia, T.
  3. Marqués, L.
  4. Gilmer, G.
Journal:
Physical Review B - Condensed Matter and Materials Physics

ISSN: 1550-235X,  1098-0121

Year of publication: 1996

Volume: 54

Issue: 23

Pages: 16683-16695

Type: Article

DOI: 10.1103/PHYSREVB.54.16683 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus