Linking ab initio energetics to experiment: kinetic Monte Carlo simulation of transient enhanced diffusion of B in Si
- Theiss, Silva K.
- Caturla, M.-J.
- de la Rubia, T.Diaz
- Johnson, M.C.
- Ural, Ant
- Griffin, P.B.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1999
Volume: 538
Pages: 291-295
Type: Article