Departamento
FISICA APLICADA
Artigos (2) Publicacións nas que participase algún/ha investigador/a
1985
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Facet development and its influence on depth resolution during sputtering of Si
Surface and Interface Analysis, Vol. 7, Núm. 1, pp. 41-48
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Modelling of glow discharge sputtering systems: Theory of the cathode fall region
Thin Solid Films, Vol. 124, Núm. 1, pp. 59-65