Fachbereich
FISICA APLICADA
Artikel (2) Publikationen, an denen Forscher/innen teilgenommen haben
1985
-
Facet development and its influence on depth resolution during sputtering of Si
Surface and Interface Analysis, Vol. 7, Núm. 1, pp. 41-48
-
Modelling of glow discharge sputtering systems: Theory of the cathode fall region
Thin Solid Films, Vol. 124, Núm. 1, pp. 59-65