Articles (2) Publications in which a researcher has participated

1985

  1. Facet development and its influence on depth resolution during sputtering of Si

    Surface and Interface Analysis, Vol. 7, Núm. 1, pp. 41-48

  2. Modelling of glow discharge sputtering systems: Theory of the cathode fall region

    Thin Solid Films, Vol. 124, Núm. 1, pp. 59-65