Publications by the researcher in collaboration with JUAN CARLOS MORENO MARIN (3)

1990

  1. Transport processes in plasma assisted deposition of superconducting thin films

    Vacuum, Vol. 41, Núm. 4-6, pp. 867-869

1986

  1. SECONDARY EFFECTS IN ION MILLING.

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 4, Núm. 1, pp. 322-325

1985

  1. EFFECTS OF SIDE WALL ION REFLECTION ON MASKLESS PHYSICAL ETCHING.

    Vacuum, Vol. 37, Núm. 5-6, pp. 491