Publicacións nas que colabora con JUAN CARLOS MORENO MARIN (7)

1994

  1. Energy spectra of reflected and sputtered particles in magnetron deposition systems

    Vacuum, Vol. 45, Núm. 10-11, pp. 1135-1137

  2. MC computer simulations of the preferential sputtering of SI-GE Alloys

    Radiation Effects and Defects in Solids, Vol. 130-131, Núm. 1, pp. 267-280

1991

  1. Studies on transport of sputtered atoms in plasma sputter-deposition systems

    91 IEEE Int Conf Plasma Sci

1990

  1. Fractal structure of collision cascades

    Nuclear Inst. and Methods in Physics Research, B, Vol. 48, Núm. 1-4, pp. 404-407

  2. Transport processes in plasma assisted deposition of superconducting thin films

    Vacuum, Vol. 41, Núm. 4-6, pp. 867-869

1986

  1. SECONDARY EFFECTS IN ION MILLING.

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 4, Núm. 1, pp. 322-325

1985

  1. EFFECTS OF SIDE WALL ION REFLECTION ON MASKLESS PHYSICAL ETCHING.

    Vacuum, Vol. 37, Núm. 5-6, pp. 491