Defect diffusion during annealing of low-energy ion-implanted silicon

  1. Bedrossian, PJ
  2. Caturla, MJ
  3. DelaRubia, TD
Book Series:
MICROSTRUCTURE EVOLUTION DURING IRRADIATION
  1. Robertson, IM (coord.)
  2. Was, GS (coord.)
  3. Hobbs, LW (coord.)
  4. delaRubia, TD (coord.)

ISSN: 0272-9172

ISBN: 1-55899-343-6

Year of publication: 1997

Volume: 439

Pages: 53-58

Congress: Symposium B on Microstructure Evolution During Irradiation, at the 1996 MRS Fall Meeting

Type: Conference paper

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Data source: WoS