Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions
- Yadav, P.
- Gatensby, R.
- Prochukhan, N.
- C. Padmanabhan, S.
- Davó-Quiñonero, A.
- Darragh, P.
- Senthamaraikannan, R.
- Murphy, B.
- Snelgrove, M.
- McFeely, C.
- Singh, S.
- Conway, J.
- O'Connor, R.
- McGlynn, E.
- Lundy, R.
- Morris, M.A.
ISSN: 1944-8252, 1944-8244
Datum der Publikation: 2022
Ausgabe: 14
Nummer: 28
Seiten: 32729-32737
Art: Artikel