Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

  1. Fuentes-Edfuf, Y.
  2. Garcia-Lechuga, M.
  3. Puerto, D.
  4. Florian, C.
  5. Garcia-Leis, A.
  6. Sanchez-Cortes, S.
  7. Solis, J.
  8. Siegel, J.
Journal:
Scientific Reports

ISSN: 2045-2322

Year of publication: 2017

Volume: 7

Issue: 1

Type: Article

DOI: 10.1038/S41598-017-04891-3 GOOGLE SCHOLAR lock_openOpen access editor