Kinetic Monte Carlo simulation for semiconductor processing: A review
- Martin-Bragado, I.
- Borges, R.
- Balbuena, J.P.
- Jaraiz, M.
Revue:
Progress in Materials Science
ISSN: 0079-6425
Année de publication: 2018
Volumen: 92
Pages: 1-32
Type: Révision