Articles (3) Publicacions en què ha participat algun/a investigador/a

1985

  1. EFFECTS OF SIDE WALL ION REFLECTION ON MASKLESS PHYSICAL ETCHING.

    Vacuum, Vol. 37, Núm. 5-6, pp. 491

  2. PERFECT FREE ZONE QUALITY DETERMINATION.

    IBM technical disclosure bulletin, Vol. 27, Núm. 8, pp. 4947-4948

  3. WAFER HOLDER FOR SINGLE-SIDE DEPOSITION OF A POLYSILICON FILM.

    IBM technical disclosure bulletin, Vol. 27, Núm. 8, pp. 4957-4958